Download Handbook of Contamination Control in Microelectronics: by Donald L. (Ed) Tolliver PDF

By Donald L. (Ed) Tolliver

This booklet introduces illness regulate in a finished demeanour. It covers the fundamentals for the newbie, and delves extensive into the extra severe problems with approach engineering and circuit production for the extra complex reader. The reader will start to see how the puzzle of infection keep watch over comes jointly and to target the basics required for excellence in sleek semiconductor production. What makes the realm of infection regulate targeted is its ubiquitous nature, throughout all elements of semiconductor production. fresh room expertise, good well-known as a primary requirement in modern-day circuit production, slightly scratches the skin in overall infection keep watch over. This guide defines and describes many of the significant different types in present infection keep watch over expertise.

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1. 67 and actual values of filter thickness and porosity. This work demonstrates that applying the fibrous filter model to membranes is not ideal yet certainly can develop an understanding of the effect of the filter parameters on performance. This is especially useful since the complex structure of cast membrane filters is not well described by simple pore models. The Nucleporetype filter's performance can be preqicted best by using the capillary pore model. The flow pressure drop model assumes that the membrane is traversed by parallel capillaries.

These filter models are often applied by including an inhomogeneity factor, €. This correction is included in the overall efficiency equations as follows: (21 ) The inhomogeneity factor is an estimation of the nonuniformity of a real filter and is defined as the ratio of the drag forces acting per unit fiber length or pressure drop and model filter or: (22) . E =-'Yl or 'Ylst E = d P theoretical ~ Pexperimental \tVhere: 77 77st theoretical single particle efficiency actual single particle efficiency.

10 Plch ) have defined the Stokes number with respect to the fiber diameter. For potential flow, the single-fiber collection efficiency resulting from impaction is a function of the Stokes number only. In a viscous flow field, this collection is a function of both the Reynolds number and the Stokes number for an isolated cylinder (single fiber) in a system of cylinders. The packing density is also important. The single fiber efficiency curves in Figure 9 (17st = single fiber efficiency due to inertial impaction) were originally developed for the interpretation of measurement of droplet sizes in supercooled clouds.

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